Rua Alves Redol, 9
1000-029 Lisboa
Portugal
INESC Microsistemas e Nanotecnologias is a private, non-profit Research and Development Institute created in January, 2002 from the former Solid State Technology group of INESC which existed since 1992. Since January 2008, INESC MN belongs to the Associated Laboratory - Institute of Nanoscience and Nanotechnology (IN) - to work in the emerging fields of Nanotechnology, BioNanotechnology and Nanosciences.
INESC MN is dedicated to leading edge research and development in strategic technological areas of micro- and nanotechnologies and the application of these technologies to electronic, biological and biomedical devices. INESC-MN research work shares the laboratories and class 100/10 clean room facilities used for student training. An important part of INESC MN’s mission is to provide advanced training at Master, PhD and post-doctoral levels, acting as a bridge between the Technical Engineering School (IST, Universidade de Lisboa) and industrial partners worldwide. INESC-MN also offers transfer of technology to both Portuguese and international industries through collaborative research, contract research, prototyping and consulting.
INESC MN provides cleanroom microfabrication and prototyping services to industrial and SME clients through:
- contract research and development
- collaborative research within a joint National or European project
- individual services according to the client’s needs
Innovation services provided by INESC MN include:
- development and prototyping of materials, devices or systems
- cleanroom microfabrication or nanofabrication processes
- consulting on materials and device design
- training of personnel in micro and nanofabrication and microfluidic devices
- small series production of prototype chips
Regional, national or European networks that INESC MN is part of:
- Rede Nacional de Infraestruturas - Portuguese Research Infrastructure Network, within the Micro&NanoLab@PT
- Marie Curie ITNs – EU Advanced Training Networks (PROSENSE, SPINICUR)
- Spintronic Factory – more than 40 EU industrial and academic partners with activities on magnetics.
URL: www.inesc-mn.pt
INESC MN - Instituto de Engenharia de Sistemas e Computadores – Microsistemas e Nanotecnologias
INESC MN - Instituto de Engenharia de Sistemas e Computadores – Microsistemas e Nanotecnologias
INESC MN has a Class 10/100 cleanroom (~200 m2) with a Class 10.000 grey area (~200 m2) for support and laboratorial equipment. INESC MN also has an additional 170 m2 of laboratory space for materials and device characterization as well as microfluidic processing.
A list of the equipment available at INESC MN include:
MATERIALS AND MICRO AND NANOFABRICATION EQUIPMENT
- Magnetron sputtering systems (5) – Nordiko 2000; Nordiko 7000; Alcatel; 2 homebuilt systems
- Ion Beam Deposition and Milling systems (2) – Nordiko 3000; Nordiko 3600
- PECVD systems (3) – Electrotech Delta; Aixtron Black Magic; 1 homebuilt system
- Reactive Ion etcher – LAM Rainbow
- Optical Lithography – Heidelberg Instr. DWLii
- E-beam Lithography – RAITH 150
- Photoresist spin coater and developer track – SVG series 88
- Plasma cleaner
FILM AND DEVICE CHARACTERIZATION
- SEM – Hitachi S-2500
- Optical and Fluorescence microscopy (Olympus and Leica)
- Nano-spotter (GeSim NP2.1 Nanoplotter)
- X-ray diffractometer
- Profilometry and Ellipsometry
- Vibrating sample magnetometry
- Device Noise characterization
- Magnetotransport characterization
- Optical and Electronic characterization of MEMS
- Optoelectronic characterization of semiconductor and microfluidic devices
DEVICE PACKAGING AND PROTOTYPING
- Dicing Saw (Disco DAD 321)
- Wirebonding
- Chemical mechanical polishing
- 3D printer
- Annealing furnaces (vacuum, magnetic field annealing)
MICROFLUIDIC DEVICES AND SYSTEMS
- Equipment for fabrication of SU-8 molds and PDMS based microfluidic devices
- Micro-milling system for fabrication of microfluidic structures in acrylic
- Nanoplotter
INESC MN provides cleanroom microfabrication and prototyping services to industry, SMEs, research institutes and university groups both inside Portugal and around the world. The types of services we provide include:
THIN FILM DEPOSITION AND DEVELOPMENT
- Magnetic thin films and multilayers
- Transparent electronics (ITO, IZO, AZO, SiO2, MgO, TiO2)
- Oxide and nitride thin films (SiO2, SiNx, AlN, TaN, MgO, TiO2)
- Thin film semiconductors (a-Si:H, nc-Si, alloys with carbon, doped layers)
MATERIALS AND DEVICE CHARACTERIZATION
- Magnetic characterization
- Optical and optoelectronic characterization
- Optical and fluorescence microscopy
- Scanning electron microscopy
- Profilometry and ellipsometry
DEVICE AND SYSTEM PROTOTYPING
- Magneto resistive sensors
- Magnetic devices
- MEMS
- Micro-electrodes
- Magnetic surface scanners
- Microfluidic devices
- Biosensors and Lab on Chip systems
- Sensors on CMOS
Technology transfer
Fast prototyping
Consulting