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Advanced Technologies for Industry

Centre for Advanced Surface Processing and Analysis by Vacuum Technologies (ReCAST)

Upper organisation
National Institute of R&D for Optoelectronics INOE 2000
Research Center

409 Magurele
077125 Magurele


The ReCAST activity is mainly related to:

  • thin film Physical Vapor Deposition (dc, rf, pulsed bipolar magnetron sputtering, cathodic vacuum arc, thermal evaporation) with associated physical characterization methods;
  • plasma surface treatments;
  • ultrahigh vacuum (UHV)  technologies, including leak detection by mass spectrometry;
  • ion sources for ion assisted surface processing.

Thin film deposition research activities were developed in the last years especially due to potential applications in material coatings and surface engineering. Ion assisted magnetron sputtering and cathodic vacuum arc were applied and developed preferentially.

Centre for Advanced Surface Processing and Analysis by Vacuum Technologies (ReCAST)

Centre for Advanced Surface Processing and Analysis by Vacuum Technologies (ReCAST)

Contact Person
Alina VLADESCU (Dragomir)
senior researcher
is SME contact

Thin films deposition:

  • Magnetron sputtering units (2 AJA UHV deposition units; Octogon deposition unit)
  • Cathodic arc deposition unit
  • Thermal/ Electron beam evaporation unit

Plasma Surface Treatment (Plasma  – nitridation unit)

Surface investigation:

  • Nano SAM Lab S Scanning Auger Microscopy System
  • Auger Electron Spectroscopy (AES) – Modular PHY system
  • Scanning Electron Microscope (SEM) with Energy Dispersive X-ray spectrometer (EDX)
  • X-Ray Diffractometer SmartLab 
  • X-ray Difractometer MiniFlex-II
  • V-670 UV-Vis/NIR Spectrophotometer
  • Jasco FT-IR-6300 Fourier Transform Infrared Spectrometer
  • AFM/STM Microscopy System
  • Veeco DEKTAK 150 Surface Profilometer
  • Nanoindenter Hysitron TI Premier
  • TriboLab UMT Bruker
  • Hall Measurement System
  • Contact angle measurement system  
  • VersaSTAT-3 potentiostat/galvanostat

​Plasma  investigation: 

  • Electrical probes
  • RF mass spectrometry – with differential pumping
  • Optical emission spectroscopy (DC and pulsed plasma)
  • Service portfolio of measuring and analysis techniques aimed at optimizing of products and production processes;
  • Development of demonstrators and prototypes, testing demonstrators and prototypes;
  • Plasma surface treatments;
  • Service for leak detection by mass spectrometry.

More details:

Service for Industry and SMEs